-Umwe / Inzugi ebyiri
Ikadiri nicyumba bikozwe mubyuma bya karubone.
Buri rugi rutanga idirishya ryubugenzuzi bwo kugenzura ibikorwa.Urukuta rw'umuryango rutanga ibyuma bidafite ingese byoroshye kuvanaho kubungabunga.
-Urugereko rwa Vacuum
Icyumba gitanga ibyuma byimbere bitagira umuyonga kugirango bikurweho byoroshye.
Amapompe ahagarara kumurongo winyuma.
Icyumba gifite urukurikirane rwa flange ntoya hagamijwe gupima.
-Uburyo bwo kuvoma vacuum
Pompe ya Diffusion + Booster pompe + pompe ya mashini
-Gupima icyuho no kugenzura
Hamwe nicyuma Pirani igipimo + icyuma Ionisiyasi
-Ibikoresho bya sisitemu yimuka
Igice cyo kugenzura
-Aluminum yo guhumeka hamwe na transformateur yingufu nyinshi
Ikadiri
Imiterere irumvikana
Igice cya firime ni kimwe
Ubwiza bwa firime
Umuvuduko mwinshi wo kuvoma, ukwezi kugufi gukora no gukora neza
Gukora biroroshye
Gukoresha ingufu nke no gukora neza
Umubare w'icyitegererezo | EV-1000 | EV-1200 | EV-1400 | EV-1800 | EV-2000 | Inzugi ebyiri cyangwa ibyumba bibiri byerekana | |
Igipimo cyicyumba cya vacuum (diameter * uburebure) | 1000 * 1100 | 1200 * 1400 | 1400 * 1600 | 1800 * 2000 | 2000 * 2200 | ||
Ibikoresho by'icyumba cya vacuum | Ibyuma bya karubone, SUS304 cyangwa SUS316L | ||||||
Ikoranabuhanga ryo gukora | vacuum resistance evaporation hamwe na tungsten & aluminium filaments, imbaraga zo guhumeka imbaraga | ||||||
Sisitemu yo kuvoma | Diffusion pompe + pompe ya mashini, pompe ya booster | ||||||
Igihe cyo kuvoma | Kuva mu kirere kugeza 5.0 * 10-2Pa munsi yiminota 8 | ||||||
Umwanya ntarengwa | 5.0 * 10-4 Pa | ||||||
Ubushyuhe bwo gukora | Ubushyuhe bw'icyumba | ||||||
Uburyo bwo gukora | Uburyo bwikora cyangwa intoki, kuri 10.4 santimetero PLC ikora kuri ecran | ||||||
Imbaraga zose | 40-80kW | 70-140kW | |||||
Ikirenge | Metero 2 * 2 | Metero 2 * 3 | Metero 3 * 3 | Metero 3 * 3 | Metero 3 * 4 | Metero 4 * 5 | Metero 5 * 6 |
Ibi bice ushobora guhitamo gukora | 1. Ingano yicyumba cya vacuum 2. Iboneza rya pompe | ||||||
Ibikoresho bidahitamo | 1. Ikimenyetso cyo kumeneka 3. Sisitemu yo kubika arc 4. Sisitemu yo gusohora Magntron |