Inline Magnetron Sputtering Sisitemu Yerekanwe Ishusho

Sisitemu ya Magnetron Sisitemu

Ibisobanuro bigufi:

Inline Magnetron Sputtering sisitemu ni ubwoko bwibikoresho bya vacuum thin firime ikora kubintu bitandukanye.Porogaramu zisanzwe zikoreshwa kumurongo wacu zirimo:

Gukora indorerwamo ya aluminium

ITO ikirahure
Kurwanya ibirahure
Imyenda ishushanyijeho ibyuma n'ibirahure

Sisitemu yo gutwikira ibereye murwego rwohejuru rwa vacuum.Itanga imikorere ihamye yo gukora kugirango izamure ireme rya firime ya vacuum.

Ohereza imeri kuri twe

Ibicuruzwa birambuye

Ibicuruzwa

Imashini ya magnetron isuka imashini ni DC (cyangwa MF) ya magnetron isuka irashobora guhuzwa nintego zitandukanye, nka: umuringa, titanium, chromium, ibyuma bitagira umwanda, nikel nibindi bikoresho byuma bishobora gutwikirwa hakoreshejwe uburyo bwo gusohora Irashobora kunoza firime, kubyara, ubucucike, uburinganire nibindi biranga.

a.Ibiranga shingiro nibipimo
b.umurongo utambitse urashobora kugaragara icyarimwe ushyizwe kuruhande rumwe
c.umusaruro ushimishije, umuvuduko wihuse ugera kuri 1 min / gukubita
d.igishushanyo mbonera, kubungabunga byoroshye
e.isahani yuburyo bukuze, umusaruro mwinshi
f.DC magnetron sputtering cathodes irashobora gutandukana bitewe nibisabwa nabakiriya
g.sisitemu ya vacuum igizwe na pompe ya mashini, pompe zumuzi, pompe zo gukwirakwiza (pompe ya molekile) Ibigize
h.Ingano yumubiri irashobora gutandukana bitewe nibisabwa nabakiriya

1) Ibikoresho byumubiri wa vacuum byakoresheje SUS304, gutunganya urukuta rwa vacuum, gutunganya urukuta rwinyuma rutunganya amashanyarazi.
2) Ukoresheje irembo ryigenga ryigenga hagati yicyumba cya vacuum - flapper valve itandukanijwe, irashobora guca neza, guhagarika gaze yimikorere.Kugeza ubu uruganda rwacu rwemeje igishushanyo mbonera cya flapper, gifunga neza, kiramba kuruta icyimbere muri rusange flap valve.
3) Ihererekanyabubasha rikoresha imiyoboro ya magneti, irinde ituze rya disiki.Kuri buri muvuduko wumurongo wose wibyakozwe ukoresheje moteri ya VVVF, umuvuduko wo kwiruka urashobora guhinduka.
4) Sisitemu yo kugenzura amashanyarazi: Gukoraho Mugaragaza na PLC kugenzura byikora, ibiganiro bya man-mashini kugirango ugere kuri sisitemu yo kwerekana amakuru, ibipimo bikora hamwe nikoranabuhanga ryo kugenzura
1) Umuvuduko ukabije wa vacuum: 6 × 1 0E-4 Pa
2) impuzandengo yumusaruro ugereranije: ukurikije ibicuruzwa byagenwe
3) Ufite substrate ufite Ingano: irashobora guhindurwa ukurikije ibisabwa
4) Guhuza firime: ± 3% tekinoroji ya tekinoroji igendanwa yazamuye cyane gukoresha intego
Igishushanyo mbonera gishyushye gifasha gutunganya neza.