Vacuum thin firime magnetron sputtering coatingng imashini

Ibisobanuro bigufi:

Vacuum magnetron sputtering tekinike ni ugukoresha ubuso bwa electrode yumugore, bipolar hamwe numurima wa magnetiki wa electron mugutembera hejuru ya cathode, mugushiraho intego yumuriro wamashanyarazi perpendicular kumurima wa magneti, electron yongera ubwonko, byongera umuvuduko wa ionisation ya gaze, mugihe ingufu nyinshi zingufu za gaze kandi zigatakaza ingufu nyuma yo kugongana hamwe nubushyuhe bwo hasi bwa substrate, gutwikira byuzuye kubintu bitarwanya ubushyuhe.